To me this looks like cyanobacteria. I had it once really bad in my tank after it was a FOWLR and I switched to a reef and the build up of the tap water and the light fueled a massive explosion. I mean my entire sand bed was covered. How I beat it was pretty simple. For starters I used 0 TDS water for water changes. Secondly I had to manually remove as much as I could from the system. So really it worked as a nutrient export. Thirdly, I had to patient and persistent. Weekly water changes and removing the bacterial mats. The outbreak lasted about a month then it just disappeared all together.